Process Monitoring Tool

<div class="h1">Titel</div> <div class="pre">Process Monitoring Tool</div> <div class="h1">Beschreibung</div> <div class="pre">Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.</div> <div class="h1">Interne Kennung</div> <div class="pre">0001</div>